S. J. You

Two‐Stage Plasma Reactor for Abatement, Capture, and Cleaning of TEOS in a Semiconductor Foreline

In Yong Park, Jin Young Lee, Sang Ho Lee, Geon Woong Eom et autres

ABSTRACT A two‐stage foreline plasma reactor is designed and fabricated, and its feasibility for TEOS abatement in PECVD is tested. During the deposition step, the solid material from the TEOS decomposition is captured on the electrode surface as a thin film, which …

kr (code pays fourni par la source)

Analysis of the DC self-bias voltage in geometrically asymmetric capacitive discharges using global model simulations

Chan‐Won Park, Hyo‐Chang Lee, S. J. You, Jung‐Hyung Kim

Abstract The DC self-bias voltage in geometrically asymmetric capacitive discharges is investigated as a function of RF power and argon gas pressure using experiments and a modified global-model analysis for a fixed reactor geometry. In the model, the grounded sidewall is treated …

kr (code pays fourni par la source)

Transition of blue-core mode helicon discharge

Lei Chang, S. J. Zhang, Jiufa Wu, Y. W. Zhang et autres

This study explores the transitional characteristics of blue-core mode helicon discharge, which to our knowledge was not particularly focused before. Parameters are measured on a recently built advanced linear plasma device, i.e., a multiple plasma simulation linear device [Sun et al., Fusion …

cn, us, jp, kr (code pays fourni par la source)

A scalable and flexible hybrid solid electrolyte based on NASICON-structure Li3Zr2Si2PO12 for high-voltage hybrid batteries

Hyun Woo Kim, S. J. You, Jong Su Han, Jae‐Kwang Kim

kr (code pays fourni par la source)

Time-domain direct capacitive coupling detection technique applicable inside a cavity structure for determination of crossing frequency in a transmission microwave frequency spectrum

Chul‐Hee Cho, Sijun Kim, Woobeen Lee, Inho Seong et autres

Abstract The conventional crossing frequency method for plasma diagnostics measures the transmission microwave frequency spectrum, called the S 21 spectrum, using transmitting and receiving antennas. It can infer electron density ( n e ) from the crossing frequency ( f cross ), …

kr (code pays fourni par la source)

Spherical tip-plasma resonance probe with an improved upper pressure limit for electron density measurements in low-density plasmas

Sijun Kim, InYong Park, GeonWoong Eom, Byonghoon Seo et autres

Abstract Plasma resonance probes (PRPs) are used for electron density measurements based on the observation of the plasma resonance (PR) negative peak frequency at the electron plasma frequency in the transmission microwave spectrum. The cylindrical tip-plasma resonance probe (CT-PRP), also known as …

kr, us (code pays fourni par la source)

Hollow-type plasma absorption probe for measurement of electron density in low pressure plasmas: a sheath thickness–insensitive technique

Sijun Kim, InYong Park, GeonWoong Eom, Byonghoon Seo et autres

Abstract We propose a hollow plasma absorption probe (PAP) designed to improve the accuracy of electron density measurement in low-pressure plasmas regardless of the sheath thickness on the planar probe surface. This improvement is achieved through an artificial hollow space acting as …

kr, us (code pays fourni par la source)

On radar cross section reduction effect by filamentary discharge in a dielectric barrier discharge

Minsu Choi, S. J. You, Jin‐Woo Jung, Changseok Cho et autres

In Radar Cross Section (RCS) reduction as a military technology, dielectric barrier discharge (DBD) plasma is one of the most effective methods. For RCS reduction, it is reported that high plasma density over 1013/cm3 is required with high power and risk of …

kr (code pays fourni par la source)

Plasma atomic layer etching of SiO2 with a low global warming potential fluorocarbon precursor (C6F6)

Inho Seong, Yebin You, Youngseok Lee, Minsu Choi et autres

Reducing greenhouse gas emissions from semiconductor manufacturing has been attracting enormous interest in both industry and academia as global warming issues have increased in significance year by year. Among various strategies, the search for etch precursors that have low global warming potential …

kr (code pays fourni par la source)

Initiation mechanism of arcing generated in RF capacitively coupled plasma

Chul‐Hee Cho, Sijun Kim, Minsu Choi, Youngseok Lee et autres

Abstract In our previous study, we established an arcing generation and measurement system and we observed prior light emission before arcing current development. However, we briefly analyzed those light emissions with strong assumptions without detailed experiment evaluations and thus, the investigation of …

kr (code pays fourni par la source)

Computational Study on the Parallel Double-Curling Probe for Multi-Site Electron Density Measurement in Low-Temperature Plasma

Sijun Kim, Wonnyoung Jeong, Youngseok Lee, Youbin Seol et autres

Plasma diagnostics, especially electron density measurements, have attracted much attention as it promotes an understanding of plasma and its applications.In this study, a parallel double-curling probe, which consists of two individual curling slot antennae and one microwave input/output port, is demonstrated for …

kr (code pays fourni par la source)

Enhancement of Ar Ion Flux on the Substrate by Heterogeneous Charge Transfer Collision of Ar Atom with He Ion in an Inductively Coupled Ar/He Plasma

Inho Seong, Sijun Kim, Minsu Choi, Woobeen Lee et autres

The understanding of ion dynamics in plasma applications has received significant attention. In this study, we examined these effects between He and Ar species, focusing on the Ar ion flux on the substrate. To control heterogeneous collisions, we varied the He addition …

kr (code pays fourni par la source)