Computational Study on the Parallel Double-Curling Probe for Multi-Site Electron Density Measurement in Low-Temperature Plasma

Le résumé fourni par la source

Plasma diagnostics, especially electron density measurements, have attracted much attention as it promotes an understanding of plasma and its applications.In this study, a parallel double-curling probe, which consists of two individual curling slot antennae and one microwave input/output port, is demonstrated for multisite electron density measurements using three-dimensional electromagnetic wave simulations.We verify its step-by-step operation, including the demonstration of a single curling probe, double-curling probe, and parallel double-curling probe.For the single curling probe, we introduce a curling probe operation, while for the double-curling probe, we verify the operation of two curling probes with a single microwave input/output port.With respect to the parallel double-curling probe, simulation results indicate that it can measure the multi-site electron density above its individual curling-slot antenna.This study is applicable for the parallelization and multiplication of curling probes in the development of plasma uniformity sensors.

Ce résumé expose les affirmations des auteurs. BNTIC ne l’interprète pas comme une validation indépendante des résultats.