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S. Sankaran, S. Arai, R. A. Augur, Mattias Beck et autres
A high performance 45nm BEOL technology with proven reliability is presented. This BEOL has a hierarchical architecture with up to 10 wiring levels with 5 in PECVD SiCOH (k=3.0), and 3 in a newly-developed advanced PECVD ultralow-k (ULK) porous SiCOH (k=2.4). Led …
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Walter Hartner, Peter Bosk, G. Schindler, Harald Bachhofer et autres
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H. Wendt, Wolfgang Hönlein, Martin Franosch, Barbara Hasler et autres
It is generally accepted that a minimum cell capacitance of about 25 fF is necessary for DRAMs. In order to allow for lateral shrinking of the cell sizes while keeping the required cell capacitance, either trench or stacked capacitors cell concepts were …
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H. Reisinger, H. Wendt, G. Beitel, Elke Fritsch
A thorough electrical characterization of BST with focus on lifetime, large device relevant areas (2/sub c/m/sup 2/) and defect density was carried out. As a result we think that BST with an SiO/sub 2/ equivalent thickness t/sub oxeq/ of 5 Å is …
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Frank Hintermaier, Bryan C. Hendrix, Deborah J. Desrochers, Jeffrey F. Roeder et autres
A new, low temperature SrBi/sub 2/Ta/sub 2/O/sub 9/ (SBT) MOCVD process exhibiting excellent run-to-run repeatability has been developed for high density FeRAM applications. 90% step coverage and good adhesion were achieved on feature sizes down to 0.5 μm on both Pt or …
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Karl Weiss, Stephan Riedel, Stefan E. Schulz, Markus Schwerd et autres
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G. Beitel, H. Wendt, Elke Fritsch, Volker Weinrich et autres
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Jeffrey F. Roeder, Bryan C. Hendrix, Frank Hintermaier, Debra A. Desrochers et autres
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Mareen I Schimmel, O. L. BOTTECHIA, H. Wendt
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H. Reisinger, H. Wendt, G. Beitel, Elke Fritsch
A thorough electrical characterization of BST with focus on lifetime, large device relevant areas (2cm2) and defect density was done. As a result we think that BST with an Si02 equivalent thickness toxqa5A is able to meet the requirements of Gb DRAMS …
Plenary lectures: microsymposium on molten carbonate fuel cells. Topics: fundamentals electrochemistry of molten salts metal electrowinning and refining and flourine evolution from molten salts corrosion of metals and non-metals and means for corrosion protection in molten salts - hot corrosion chemical reactions …
Since the early investigation of A. Klemm, the demixing of the cations of molten binary salt mixtures with a common anion due to the different mobilities of two different cations had been investigated in numerous experiments and the respective results interpreted in …
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