Profil bibliographique

Michael E. Littau

Informations fournies par OpenAlex. Research Africa ne déduit ni nationalité, ni poste, ni coordonnées personnelles.

12Publications signalées

123Citations signalées

1Affiliations récentes

Les institutions déclarées

Les domaines associés

Optical Coatings and GratingsSurface Roughness and Optical MeasurementsAdvancements in Photolithography TechniquesAdvanced Measurement and Metrology TechniquesSemiconductor materials and devices

Les publications récentes

2004 conference-paper OpenAlex

Successful application of angular scatterometry to process control in sub-100-nm DRAM device

Jin-ah Kim, Seong‐Jin Kim, Soo-Bok Chin, Seok-Hwan Oh et autres

kr, us (code pays fourni par la source)

3 citations Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE

2004 conference-paper OpenAlex

Comparison of solutions to the scatterometry inverse problem

Christopher J. Raymond, Michael E. Littau, A.D. Chuprin, Simon Ward

us (code pays fourni par la source)

43 citations Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE

2003 conference-paper OpenAlex

Evaluating scanner lens spherical aberration using scatterometer

Changan Wang, Gary Zhang, Colin Tan, Chris Atkinson et autres

us (code pays fourni par la source)

0 citations Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE

2003 conference-paper OpenAlex

Scatterometer-based scanner fingerprinting technique(ScatterLith) and its applications in image field and ACLV analysis

Chang‐An Wang, Gary Zhang, Stephen J. DeMoor, Mark A. Boehm et autres

us (code pays fourni par la source)

1 citation Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE

2003 conference-paper OpenAlex

Applications of angular scatterometry for the measurement of multiply periodic features

Christopher J. Raymond, Michael E. Littau, Chang-Jin Sohn, Jin A. Kim et autres

us, kr (code pays fourni par la source)

11 citations Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE

2002 conference-paper OpenAlex

Accuracy and precision of scatterometer measurements relative to conventional CD metrology

Todd R. Hayes, Reginald R. Bowley, Michael E. Littau, C.J. Raymond

us (code pays fourni par la source)

1 citation

2002 article OpenAlex

Diode laser measurements of CFx species in a low-pressure, high-density plasma reactor

Michael E. Littau, Mark J. Sowa, J.L. Cecchi

us (code pays fourni par la source)

5 citations Journal of Vacuum Science & Technology A Vacuum Surfaces and Films

2002 conference-paper OpenAlex

Novel implementations of scatterometry for lithography process control

Michael E. Littau, Christopher J. Raymond, Christopher Gould, Christy Gambill

us (code pays fourni par la source)

5 citations Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE

2001 conference-paper OpenAlex

Scatterometry for shallow trench isolation (STI) process metrology

Christopher J. Raymond, Michael E. Littau, Richard J. Markle, Matthew A. Purdy

us (code pays fourni par la source)

9 citations Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE

2001 conference-paper OpenAlex

Gauge control for sub-170-nm DRAM product features

Neal Lafferty, Christopher Gould, Michael E. Littau, Christopher J. Raymond

us (code pays fourni par la source)

1 citation Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE

2001 conference-paper OpenAlex

Asymmetric line profile measurement using angular scatterometry

Christopher J. Raymond, Michael E. Littau, Todd A. Pitts, Péter Nagy

us (code pays fourni par la source)

1 citation Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE

2000 article OpenAlex

Fluorocarbon polymer deposition kinetics in a low-pressure, high-density, inductively coupled plasma reactor

Mark J. Sowa, Michael E. Littau, V. Pohray, J.L. Cecchi

us (code pays fourni par la source)

43 citations Journal of Vacuum Science & Technology A Vacuum Surfaces and Films

Notice OpenAlex

BNTIC News n’est pas le producteur de ces données. Les publications sont interrogées à la demande dans Crossref, OpenAIRE, DOAJ, Europe PMC, HAL, DataCite, AfricArXiv, ROR et la Banque mondiale, sans clé d’accès. OpenAlex reste optionnel. Aucun service payant n’est nécessaire et aucune donnée externe n’est enregistrée en base. Consulter les sources et leurs limites.