Profil bibliographique

Soo-Bok Chin

Informations fournies par OpenAlex. Research Africa ne déduit ni nationalité, ni poste, ni coordonnées personnelles.

11Publications signalées

18Citations signalées

1Affiliations récentes

Les institutions déclarées

Les domaines associés

Integrated Circuits and Semiconductor Failure AnalysisAdvancements in Photolithography TechniquesElectron and X-Ray Spectroscopy TechniquesThin-Film Transistor TechnologiesSilicon and Solar Cell Technologies

Les publications récentes

2014 conference-paper OpenAlex

Highly effective and accurate weak point monitoring method for advanced design rule (1x nm) devices

Jeongho Ahn, Shijin Seong, Minjung Yoon, Il-Suk Park et autres

kr, us (code pays fourni par la source)

2 citations Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE

2013 conference-paper OpenAlex

Optical analysis on the wafer defect inspection for yield enhancement

Jeongho Ahn, Byoungho Lee, Dong-Ryul Lee, Shijin Seong et autres

kr (code pays fourni par la source)

1 citation Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE

2012 conference-paper OpenAlex

Defect distribution study at through silicon via (TSV) bottom by scanning white-light interference microscopy

Jeongho Ahn, Jaeyoung Park, Dongchul Ihm, Byoungho Lee et autres

kr (code pays fourni par la source)

1 citation Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE

2012 conference-paper OpenAlex

Accelerating litho technology development for advanced design node flash memory FEOL by next-generation wafer inspection and SEM review platforms

Byoung Ho Lee, Jeongho Ahn, Dongchul Ihm, Soo-Bok Chin et autres

kr, us (code pays fourni par la source)

3 citations Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE

2008 conference-paper OpenAlex

Ellipsometric inspection of the inner surface of pellicle-covered masks

Sangyouk Lee, Chulgi Song, Jusang Rhim, Hyoungjoo Lee et autres

kr (code pays fourni par la source)

0 citations Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE

2007 conference-paper OpenAlex

Novel method of under-etch defect detection for contact layers based on Si substrate using optic wafer inspection tools

Byoungho Lee, Jin-Seo Choi, Soo-Bok Chin, Do-Hyun Cho et autres

kr (code pays fourni par la source)

1 citation Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE

2005 conference-paper OpenAlex

Characterization analysis study of μ-bridge defect using simulation and wafer inspection tools

Tae-yong Lee, Byoung-ho Lee, Soo-Bok Chin, Do-Hyun Cho et autres

kr, us (code pays fourni par la source)

0 citations Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE

2004 conference-paper OpenAlex

Electrical defect SEM review under the various electric circumstances on SAC layer

Tae Yong Lee, Nam-Koong Whan, Byoung Ho Lee, Soo-Bok Chin et autres

kr, il (code pays fourni par la source)

1 citation Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE

2004 conference-paper OpenAlex

Optical characterization of defects on patterned wafers: exploring light polarization

Byoung Ho Lee, Soo-Bok Chin, Do Hyun Cho, Chang-Lyong Song et autres

kr, il (code pays fourni par la source)

6 citations Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE

2004 conference-paper OpenAlex

Experimental methodology of contact edge roughness on sub-100-nm pattern

Tae Yong Lee, Dongchul Ihm, Hyo Kang, Jun Bum Lee et autres

kr, il (code pays fourni par la source)

0 citations Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE

2004 conference-paper OpenAlex

Successful application of angular scatterometry to process control in sub-100-nm DRAM device

Jin-ah Kim, Seong‐Jin Kim, Soo-Bok Chin, Seok-Hwan Oh et autres

kr, us (code pays fourni par la source)

3 citations Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE

Notice OpenAlex

BNTIC News n’est pas le producteur de ces données. Les publications sont interrogées à la demande dans Crossref, OpenAIRE, DOAJ, Europe PMC, HAL, DataCite, AfricArXiv, ROR et la Banque mondiale, sans clé d’accès. OpenAlex reste optionnel. Aucun service payant n’est nécessaire et aucune donnée externe n’est enregistrée en base. Consulter les sources et leurs limites.