Zuanyi Li

Physical dose modeling and throughput optimization in EUV computational lithography

Austin Peng, Christopher J. Kaplan, Jeff Zhiqiang Lu, Michael Crouse et autres

Despite being crucial in an optical lithography process, “dose” has remained a relative concept in the computational lithography regime. It usually takes the form of a percentage deviation from a pre-identified “nominal condition” under the same illumination shape. Dose comparison between different …

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Full chip computational lithography for KrF multi-focal imaging (MFI) (Conference Presentation)

Will Conley, Vince Plachecki, Stephen Hsu, Michael Crouse et autres

Over the years, lithography engineers have continued to focus on CD control, overlay and process capability to meet node requirements for yield and device performance. Previous work by Fukuda1 developed a multi-exposure technique at multi-focus positions to image contact holes with adequate …

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Thermal transport in layer-by-layer assembled polycrystalline graphene films

David Estrada, Zuanyi Li, Gyung‐Min Choi, Simon Dunham et autres

Abstract New technologies are emerging which allow us to manipulate and assemble 2-dimensional (2D) building blocks, such as graphene, into synthetic van der Waals (vdW) solids. Assembly of such vdW solids has enabled novel electronic devices and could lead to control over …

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Thermal transport across graphene step junctions

Miguel Muñoz Rojo, Zuanyi Li, C. Sievers, Alex Bornstein et autres

Abstract Step junctions are often present in layered materials, i.e. where single-layer regions meet multilayer regions, yet their effect on thermal transport is not understood to date. Here, we measure heat flow across graphene junctions (GJs) from monolayer-to-bilayer graphene, as well as …

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Size Dependence and Ballistic Limits of Thermal Transport in Anisotropic Layered Two-Dimensional Materials

Zuanyi Li, Yizhou Liu, Lucas Lindsay, Yong Xu et autres

Layered materials have uncommonly anisotropic thermal properties due to their strong in-plane covalent bonds and weak out-of-plane van der Waals interactions. Here we examine heat flow in graphene (graphite), h-BN, MoS2, and WS2 monolayers and bulk films, from diffusive to ballistic limits. …

Electrical and Thermoelectric Transport by Variable Range Hopping in Thin Black Phosphorus Devices

Seon Jae Choi, Bum-Kyu Kim, Tae‐Ho Lee, Yun Ho Kim et autres

The moderate band gap of black phosphorus (BP) in the range of 0.3-2 eV, along a high mobility of a few hundred cm(2) V(-1) s(-1) provides a bridge between the gapless graphene and relatively low-mobility transition metal dichalcogenides. Here, we study the …

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Thermal conductivity of chirality-sorted carbon nanotube networks

Feifei Lian, Juan Pablo Llinas, Zuanyi Li, David Estrada et autres

The thermal properties of single-walled carbon nanotubes (SWNTs) are of significant interest, yet their dependence on SWNT chirality has been, until now, not explored experimentally. Here, we used electrical heating and infrared thermal imaging to simultaneously study thermal and electrical transport in …

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Thermal transport in graphene-based nanostructures and other two-dimensional materials

Zuanyi Li

Heat conduction in nanomaterials is an important area of study, with both fundamental and technological implications. However, little is known about heat flow in two-dimensional (2D) materials or devices with dimensions comparable to the phonon mean free path (MFP). Here, we investigated …

Energy efficiency and conversion in 1D and 2D electronics

Eric Pop, Chris English, Feng Xiong, Feifei Lian et autres

We review our recent studies at the intersection of energy, nanomaterials and nanoelectronics. Through careful high-field studies of two-dimensional (2D) devices based on graphene and MoS2, we have uncovered details regarding their physical properties and band structure. We have investigated thermoelectric effects …

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High-field and thermal transport in 2D atomic layer devices

Andrey Y. Serov, Vincent E. Dorgan, Ashkan Behnam, Chris English et autres

This paper reviews our recent results of high-field electrical and thermal properties of atomically thin two-dimensional materials. We show how self-heating affects velocity saturation in suspended and supported graphene. We also demonstrate that multi-valley transport must be taken into account to describe …

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Carbon Nanotube Circuit Integration up to Sub-20 nm Channel Lengths

Max M. Shulaker, Jelle Van Rethy, Tony F. Wu, Luckshitha Suriyasena Liyanage et autres

Carbon nanotube (CNT) field-effect transistors (CNFETs) are a promising emerging technology projected to achieve over an order of magnitude improvement in energy-delay product, a metric of performance and energy efficiency, compared to silicon-based circuits. However, due to substantial imperfections inherent with CNTs, …

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Ballistic Thermal Conductance in Layered Two-Dimensional Materials

Zuanyi Li, Yizhou Liu, Yong Xian Xu, Wenhui Duan et autres