Analyzing line width roughness (LWR) sensitivity to resist and laser-induced speckle for enhanced PSD-based quantification

Le résumé fourni par la source

As the proportion of LWR/CDU in the EPE budget has tightened in recent years, its reduction has become a critical issue. Among many factors, contributions of resist and speckle play a key role in LWR/CDU. The authors therefore carried out a series of experiments in which the resist compositions and the speckle were controlled in order to validate the above points. The spatial frequency of the speckle was controlled by controlling the illumination conditions of the scanner in the experiments. The experiments not only clarified the contributions of resist and speckle, but also confirmed the contribution of the interaction between resist and speckle. We were able to use PSD analysis with the results of a simplified model-based Monte Carlo simulation to explain the interaction between resist and speckle. In addition, experimental results proved that LWR/CDU reduction can be achieved by reducing speckle and optimizing resist composition.

Ce résumé expose les affirmations des auteurs. BNTIC ne l’interprète pas comme une validation indépendante des résultats.