Thermal effect study in excimer laser ablation of polyimide
Jianhui Gu, Eugene Tay, Puay K. Lim, Pean Lim
In this paper we reported the results of investigation on surface deformation caused by thermal effect during excimer laser ablation of polyimide. Obvious surface deformation around the hole entrance was observed during the experiment. The surface topology and cross-section of the ablated …