Hiroshi Kou

Line wiggling due to plasma-induced film stress and prevention by surface roughness modification

Amelia Turnquist, Naoyuki Kofuji, Joseph Sebastian, Hiroshi Kou et autres

To investigate the impact of plasma-induced stress on line wiggling, pattern deformation was compared with and without hardmask exposure to the plasma during etching of porous SiOCH (p-SiOCH) with TiN hardmasks of 28 nm pitch. Wiggling occurred in patterns with low residual …

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Measurement of KN scattering below the KN mass threshold

H. Noumi, Kentaro Inoue, Shingo Kawasaki, Shuu Aikawa et autres

Abstract. We measured πE invariant mass spectra below and above the K¯N mass threshold in the K−d → NπE reaction in order to study the K¯N interaction and the Λ(1405) resonance. This reaction can be described by the two-step process: (i) K¯N1 …

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Evaluation of TiN hardmask films to prevent line wiggling due to plasma-induced film stress

Amelia Turnquist, Naoyuki Kofuji, Joseph Sebastian, Zecheng Liu et autres

The impact of both intrinsic and plasma-induced stress of a TiN hardmask on line wiggling was investigated via etching of p-SiOCH with 28 nm pitch, line and space (L/S) EUV resist patterning. Experimental stacks included crystalline PVD TiN with an intrinsic stress …

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Summary of theK−ppbound-state observation in E15 and future prospects

F. Sakuma, Shuhei Ajimura, Takaya Akaishi, H. Asano et autres

The possible existence of deeply-bound $\bar K$-nuclear bound states, kaonic nuclei, has been widely discussed as products of the strongly attractive $\bar K$Ninteraction in I = 0 channels. Investigations of those exotic states will provide us unique information of the $\bar K$Ninteraction …

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\(\bar{K}\)-Nuclear Bound State at J-PARC

F. Sakuma, Shuhei Ajimura, H. Asano, George Beer et autres

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K− pp bound system at J-PARC

F. Sakuma, Shuhei Ajimura, H. Asano, George Beer et autres

The K¯NN bound system, symbolically denoted as “K−pp”, is the simplest K¯-nuclear bound system which has been widely discussed as a consequence of the strongly attractive K¯N interaction in I = 0 channels. Many theoretical works have pointed out the existence of …

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1 The K1.8BR spectrometer system at J-PARC

Keizo Agari, Shuhei Ajimura, George Beer, Hyoungchan Bhang et autres

A new spectrometer system has been designed and constructed at the secondary beam line K1.8BR in the hadron hall of J-PARC to investigate |$\bar {K} N$| interactions and |$\bar {K}$|-nuclear bound systems. The spectrometer consists of a high precision beam line spectrometer, …

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Search for the deeply bound $K^-pp$ state via the $^3$He($K^-,n)$ reaction at $p_{K^-}$=1 GeV/$c$

T. Hashimoto, Shuhei Ajimura, George Beer, Hyoungchan Bhang et autres

An experiment to search for the $K^-pp$ bound state was performed via the in-flight $^3$He($K^-,n)$ reaction using 5.3 $\times$ $10^9$ kaons at 1 GeV/$c$ at the J-PARC hadron experimental facility. In the semi-inclusive neutron missing-mass spectrum at $\theta_{n}^{lab}=0^\circ$, no significant peak was …

Plasma-enhanced CVD low-k process enabling global planarity by controlling flowability

Dai Ishikawa, Akinori Nakano, Shintaro Ueda, Hiroshi Kou et autres

Plasma-enhanced CVD (PECVD) flowable low-k process compatible with the conventional UV cure process has been developed. Reduction of shrinkage by the UV cure was critical to ensure gap-filling capability with planarity, which was achieved by deposition condition tuning to reduce hydro-carbon constituent …

Secondary charged beam lines at the J-PARC hadron experimental hall

Keizo Agari, Shun Enomoto, Hiroyuki Fujioka, Yuya Fujiwara et autres

Three beam lines for secondary charged particles are constructed in the hadron experimental hall of J-PARC. The K1.8 beam line, which incorporates two separators, delivers clean beams of kaons up to 2 GeV/c. The K1.8BR beam line is a branch of K1.8, …

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Beam Commissioning of K1.8BR Beamline at J-PARC Hadron Hall

Hiroshi Kou

K1.8BR beamline at J-PARC Hadron Hall is brand-new beamline. Beam-tuning and secondary particles yield study about Kaon and p-bar have done to know the performance of K1.8BR beamline. We measured momentum dependence of the yields of K+ K−, p-bar and it is …

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