Efe Ke­man­eci

Atomic oxygen densities in parallel plate radio frequency driven He/O2 micro-scaled atmospheric pressure plasma jets: a systematic model validation study

Youfan He, Ralf Peter Brinkmann, Efe Ke­man­eci, Andrew Robert Gibson

Abstract Reactive species produced by atmospheric pressure plasma jets have high application potential in the fields of biomedicine and surface processing. An extensive validation between the simulation results in this work and measurement data from various research groups is carried out in …

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Dynamics of reactive oxygen species produced by the COST microplasma jet

Sascha Chur, Robin Minke, Youfan He, Máté Vass et autres

Abstract This study is focused on measuring the densities of the excited molecular oxygen species, O 2 ( a 1 Δ g ) and O 2 ( b 1 Σ g + ) , produced in a COST atmospheric pressure plasma jet …

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Atomic oxygen densities in He/O$_2$ micro-scaled atmospheric pressure plasma jets: a systematic model validation study

Youfan He, Ralf Peter Brinkmann, Efe Ke­man­eci, Andrew Robert Gibson

Reactive species produced by atmospheric pressure plasma jets have high application potential in the fields of biomedicine and surface processing. An extensive validation between the simulation results in this work and measurement data from various research groups is carried out in order …

Electromagnetic particle-in-cell modeling of an electron cyclotron resonance plasma discharge in hydrogen

Denis Eremin, Yulia Sergeevna Sharova, Luuk Heijmans, Andrei M. Yakunin et autres

Abstract A low pressure discharge sustained in molecular hydrogen with help of the electron cyclotron resonance heating at a frequency of 2.45 GHz is simulated using a fully electromagnetic implicit charge- and energy-conserving particle-in-cell/Monte Carlo code. The simulations show a number of …

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Dynamics of reactive oxygen species produced by the COST microplasma jet

Sascha Chur, Robin Minke, Youfan He, Máté Vass et autres

This study is focused on measuring the densities of the excited molecular oxygen species, O$_{2}(\text{a}^{1}Δ_{\text{g}})$ and O$_{2}(\text{b}^{1}Σ_{\text{g}}^{+})$, produced in a COST atmospheric pressure plasma jet using a helium-oxygen mixture. Knowledge of the ozone density is critical for measurements because of its high …

Zero-dimensional simulations of DC ns-pulsed plasma jet in N2 at near atmospheric pressure: validation of the vibrational kinetics

Youfan He, Jan Kuhfeld, N D Lepikhin, Uwe Czarnetzki et autres

Abstract A Direct current (DC) nanosecond (ns)-pulsed plasma jet fed with N2 at near atmospheric pressure ( 20 000 Pa) is studied using a transient zero-dimensional (0-D) model coupled with a two-term Boltzmann equation solver. Good agreement is observed between the simulated …

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A global plasma and surface model of hydrogen/methane inductively coupled discharge to analyze hydrocarbon plasma–surface interactions in extreme-ultraviolet lithography machines

Efe Ke­man­eci, Achim von Keudell, Luuk Heijmans, Andrei M. Yakunin et autres

Hydrocarbon contamination is associated with light transmission losses in modern lithography machines, which contain extreme-ultraviolet-induced plasma. A volume-averaged global and deposition/etch surface model of a reference hydrogen/methane inductive discharge is developed to investigate the plasma–surface interactions. The simulation results are validated against …

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PECVD and PEALD on polymer substrates (part II): Understanding and tuning of barrier and membrane properties of thin films

Teresa de los Arcos, Peter Awakowicz, Marc Böke, Nils Boysen et autres

Abstract This feature article presents insights concerning the correlation of plasma‐enhanced chemical vapor deposition and plasma‐enhanced atomic layer deposition thin film structures with their barrier or membrane properties. While in principle similar precursor gases and processes can be applied, the adjustment of …

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PECVD and PEALD on polymer substrates (Part II): Understanding and tuning of barrier and membrane properties of thin films

Teresa de los Arcos, Peter Awakowicz, Marc Böke, Nils Boysen et autres

This feature article presents insights concerning the correlation of PECVD and PEALD thin film structures with their barrier or membrane properties. While in principle similar precursor gases and processes can be applied, the adjustment of deposition parameters for different polymer substrates can …

Modeling of very high frequency large-electrode capacitively coupled plasmas with a fully electromagnetic particle-in-cell code

Denis Eremin, Efe Ke­man­eci, Masaaki Matsukuma, Thomas Mussenbrock et autres

Abstract Phenomena taking place in capacitively coupled plasmas with large electrodes and driven at very high frequencies are studied numerically utilizing a novel energy- and charge-conserving implicit fully electromagnetic particle-in-cell (PIC)/Monte Carlo code ECCOPIC2M. The code is verified with three model problems …

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On the justification of the Poisson–Boltzmann equation in the context of technological plasmas

Kevin Köhn, Dennis Krüger, Efe Ke­man­eci, Liang Xu et autres

Abstract The Poisson–Boltzmann (PB) equation is a nonlinear differential equation for the electric potential that describes equilibria of conducting fluids. Its standard justification is based on a variational principle which characterizes the thermodynamic equilibrium of a system in contact with a heat …

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Zero-dimensional and pseudo-one-dimensional models of atmospheric-pressure plasma jets in binary and ternary mixtures of oxygen and nitrogen with helium background

Youfan He, Patrick Preissing, David Steuer, Maximilian Klich et autres

Abstract A zero-dimensional (volume-averaged) and a pseudo-one-dimensional plug-flow (spatially resolved) model are developed to investigate atmospheric-pressure plasma jets operated with He, He/O2, He/N2 and He/N2/O2 mixtures. The models are coupled with the Boltzmann equation under the two-term approximation to self-consistently calculate the …

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