Toward a 10 GHz High-Order Surface Acoustic Wave Resonator: A Finite-Element Study on LiNbO3/SiC Heterostructure Incorporating Embedded Electrodes
Yixuan Wang, Hao Li, Qiong Wu, Tianxiang Wu et autres
The escalating demand for high-frequency acoustic devices in 5G/6G communications imposes stringent requirements on surface acoustic wave (SAW) resonators, including high operating frequency, large electromechanical coupling coefficient K2, and high quality factor Q. However, conventional SAW devices suffer from severe trade-offs among …
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