Recrystallization‐Driven Formation of Single‐Crystalline MoS 2 by Metal‐Organic Chemical Vapor Epitaxy
Iryna Kandybka, Pawan Kumar, Henry Medina Silva, Benjamin Groven et autres
ABSTRACT Single‐crystalline molybdenum disulfide (MoS 2 ) emerges as a leading n‐type channel material for high‐performance electronic devices in the angstrom era of computing. Chemical vapor epitaxy of single‐crystalline MoS 2 relies on sapphire template engineering to impose a preferred crystalline orientation. …
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