Tuning the Mechanical and Protective Properties of ZrYN Hard Coatings via Nitrogen Flow Ratio in Reactive Magnetron Sputtering
Haojun Zeng, Minjie Fang, Qiaoyan Chen, Junjie Chen et autres
Yttrium doping has been reported to be an effective approach to enhance the mechanical and protective properties of ZrN coatings by magnetron sputtering. Nitrogen (N2) flow ratio during reactive magnetron sputtering is known to critically influence the stoichiometry, defect structure, and microstructure …
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