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Yu Wang, Zhaoyu Chen, Zili Chen, Hao Wu et autres
The spatiotemporal evolution of the electric field vectors during the initial 20 RF cycles of the breakdown phase. Alt Text: Animated two-dimensional R-Z vector map of the electric field during RF breakdown. The field initially penetrates the chamber and later becomes concentrated …
Yu Wang, Zhaoyu Chen, Zili Chen, Hao Wu et autres
The transient spatial evolution of the net charge density within a single RF cycle at steady state. Alt Text: Animated two-dimensional R-Z color map of net charge density over one steady-state RF cycle. The quasi-neutral plasma alternately penetrates into and recedes from …
Yu Wang, Zhaoyu Chen, Zili Chen, Hao Wu et autres
The transient spatial evolution of the net charge density within a single RF cycle at steady state. Alt Text: Animated two-dimensional R-Z color map of net charge density over one steady-state RF cycle. The quasi-neutral plasma alternately penetrates into and recedes from …
Yu Wang, Zhaoyu Chen, Zili Chen, Hao Wu et autres
The transient spatial evolution of the electric field vectors within a single RF cycle at steady state. Alt Text: Animated two-dimensional R-Z vector map of the electric field over one steady-state RF cycle. Strong fields remain localized near electrode sheaths, the trench …
Yu Wang, Zhaoyu Chen, Zili Chen, Hao Wu et autres
Hollow-cathode discharge (HCD) is widely applied in processes like chemical vapor deposition because its trench structures can enhance ionization and plasma density and promote sputtering. While discharge characteristics have been studied extensively, existing studies on the breakdown phase have predominantly focused on …
cn (code pays fourni par la source)
Yu Wang, Zhaoyu Chen, Zili Chen, Hao Wu et autres
The spatiotemporal evolution of the electric field vectors during the initial 20 RF cycles of the breakdown phase. Alt Text: Animated two-dimensional R-Z vector map of the electric field during RF breakdown. The field initially penetrates the chamber and later becomes concentrated …
Yu Wang, Zhaoyu Chen, Zili Chen, Hao Wu et autres
The transient spatial evolution of the electric field vectors within a single RF cycle at steady state. Alt Text: Animated two-dimensional R-Z vector map of the electric field over one steady-state RF cycle. Strong fields remain localized near electrode sheaths, the trench …
Yu Wang, Zhaoyu Chen, Zili Chen, Hao Wu et autres
The spatiotemporal evolution of the electron density distribution during the initial 20 RF cycles of the breakdown phase. Alt Text: Animated two-dimensional R-Z color map of electron density during RF breakdown. The density evolves from a weak, diffuse distribution to a localized …
Hao Wu, Wei Jiang, Zhipeng Chen, Yu Wang et autres
Hollow cathode discharge (HCD) is widely applied in processes like chemical vapor deposition because its trench structures can enhance ionization and plasma density and promote sputtering. While discharge characteristics have been studied extensively, existing studies on the breakdown phase have predominantly focused …
Yu Wang, Zhaoyu Chen, Zili Chen, Hao Wu et autres
The spatiotemporal evolution of the electron density distribution during the initial 20 RF cycles of the breakdown phase. Alt Text: Animated two-dimensional R-Z color map of electron density during RF breakdown. The density evolves from a weak, diffuse distribution to a localized …
Hao Wu, Wei Jiang, Zhipeng Chen, Yu Wang et autres
Hollow cathode discharge (HCD) is widely applied in processes like chemical vapor deposition because its trench structures can enhance ionization and plasma density and promote sputtering. While discharge characteristics have been studied extensively, existing studies on the breakdown phase have predominantly focused …
Minglun Tian, Pengze Xiao, Zhaoyu Chen, Zili Chen et autres
A two-dimensional axisymmetric Particle-in-Cell/Monte Carlo collision model is employed to investigate the effects of magnetic field strength on magnetized inductively coupled plasma. The results show that increasing magnetic field strength significantly modifies plasma characteristics and energy transport. The electron density increases and …
cn (code pays fourni par la source)
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