Andreas Ohl

Physics of the Advanced Plasma Source: a review of recent experimental and modeling approaches

Ralf Peter Brinkmann, J. Harhausen, Benjamin Schröder, Martin Lapke et autres

Abstract The Advanced Plasma Source (APS), a gridless hot cathode glow discharge capable of generating an ion beam with an energy of up to 150 eV and a flux of 10 19 s −1 , is a standard industrial tool for the …

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MINIATURIZED ATMOSPHERIC PRESSURE PLASMA JET (APPJ) FOR DEPOSITION OF SIOX FILMS WITH DIFFERENT SILICON-ORGANIC COMPOUNDS – A COMPARATIVE STUDY

Rüdiger Foest, Jan Schäfer, Antje Quade, Andreas Ohl

Abstract. Thin films are deposited by means of an APPJ, driven at 27.17 MHz with Ar and small admixtures (0.5 ppm) of silicon organic compounds as thin film precursor. Static deposition experiments have been performed. The radial dependence of these characteristic footprints …

Influence of supersonic ions and nonlocal electron kinetics on the sheath voltage in an expanding plasma

Benjamin Schröder, Ralf Peter Brinkmann, J. Harhausen, Rüdiger Foest et autres

We present the investigation of the sheath potential in an expanding plasma. The properties of the expanding plasma are measured by means of a Langmuir probe. The obtained data is used to calculate the sheath potential and the electron distribution function. We …

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Diagnostics and Monitoring of a Plasma Beam Source based on Optical Emission Spectroscopy

J. Harhausen, Rüdiger Foest, Detlef Loffhagen, Andreas Ohl et autres

Process diagnostics and monitoring using the multipole resonance probe in an inhomogeneous plasma for ion-assisted deposition of optical coatings

Tim Styrnoll, J. Harhausen, Martin Lapke, Robert Storch et autres

The application of a multipole resonance probe (MRP) for diagnostic and monitoring purposes in a plasma ion-assisted deposition (PIAD) process is reported. Recently, the MRP was proposed as an economical and industry compatible plasma diagnostic device (Lapke et al 2011 Plasma Sources …

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Interpretation of optical emission in a strongly inhomogeneous PIAD environment

J. Harhausen, Ralf-Peter Brinkmann, Rüdiger Foest, Sergey Gorchakov et autres

A variety of methods exists for the production of high quality optical coatings. These are for instance magnetron or ion beam sputtering, or thermal evaporation assisted by ion or plasma ion beam sources. The choice of a particular technique is due to …

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Fluorocarbon Plasma Polymer Deposition by an Atmospheric Pressure Microplasma Jet Using Different Precursor Molecules – A Comparative Study

Andreas Vogelsang, Andreas Ohl, Rüdiger Foest, Klaus‐Dieter Weltmann

Abstract The plasma polymerization of two fluorocarbon compounds (octafluorocyclobutane (c‐C4F8) and octafluoropropane (C3F8)) using a non‐thermal atmospheric pressure microplasma jet is being compared. The source is operated with argon as working gas at a flow rate of 6 slm and 10–100 sccm …

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On plasma ion beam formation in the Advanced Plasma Source

J. Harhausen, Ralf Peter Brinkmann, Rüdiger Foest, Matthias Hannemann et autres

The Advanced Plasma Source (APS) is employed for plasma ion-assisted deposition (PIAD) of optical coatings. The APS is a hot cathode dc glow discharge which emits a plasma ion beam to the deposition chamber at high vacuum ( p ≲ 2 × …

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Interpretation of optical emission in a strongly inhomogeneous PIAD environment

J. Harhausen, Ralf-Peter Brinkmann, Rüdiger Foest, Sergey Gorchakov et autres

A variety of methods exists for the production of high quality optical coatings. These are for instance magnetron or ion beam sputtering, or thermal evaporation assisted by ion or plasma ion beam sources. The choice of a particular technique is due to …

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Determination of Electron and Ion Energy Distribution Functions in a Plasma Ion Assisted Deposition (PIAD) Process

J. Harhausen, Rüdiger Foest, Andreas Ohl

Kinetic Modeling of the Advanced Plasma Source

Benjamin Schroeder, Ralf Peter Brinkmann, J. Harhausen, Andreas Ohl

On Generation and Propagation of the Plasma Ion Beam for Plasma Ion Assisted Deposition (PIAD) of Optical Coatings

J. Harhausen, Ralf Peter Brinkmann, Rüdiger Foest, Andreas Ohl et autres