Martin P. Seah

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Lidija Matjačić, Martin P. Seah, Gustavo F. Trindade, Alexander Pirkl et autres

The cover image is based on the Article Martin P Seah MBE – Shining a Light on Surface Chemical Analysis by Ian Gilmore et al., https://doi.org/sia.7058.

Sputtering, Cluster Primary Ions and Static SIMS

Martin P. Seah

Sputtering using cluster primary ion beams is very important for the future development of static SIMS and the SIMS depth profiling of organic layers. However, different results from different laboratories may be confusing. Analytical models have an important function for enabling the …

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Recent Advances to Establish XPS as an Accurate Metrology Tool

Martin P. Seah

A brief review is given of the project to measure the thickness of SiO2 on Si in the range 1.5 nm to 8 nm by XPS. An outline is provided for the rationale of the work and the way that progress was …

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New Aspects in Quantitative Surface Analysis

Martin P. Seah

The development and analysis of data bases of traceable AES and XPS reference spectra are described. The spectra have all instrumental terms calibrated and removed except the X-ray photon flux density. Auger electron intensities, in terms of the electrons emitted per steradian …

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Accurate Thickness Measurements in Thin Films with Surface Analysis

Martin P. Seah

Quantification in surface analysis using Auger electron spectroscopy and X-ray photoelectron spectroscopy has been the topic of significant work at NPL. A new approach to the quantification of materials that are homogeneous over the analysis volume has been developed using new average …

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A system for the intensity calibration of electron spectrometers

Martin P. Seah, Mineharu Suzuki, Kazuhiko Doumae, Akihiro Tanaka

オージェ電子分光法（AES: Auger electron spectroscopy），X線光電子分光法（XPS: x-ray photoelectron spectroscopy）で使用される電子エネルギー分析器に関する強度/エネルギー応答関数（response function）の校正方法について記述する．どのようにデータが導出され，SI単位系のもとでどのような校正方法が遡及可能（traceable）かを，完全な系での基本的な物理的な原理の詳細を述べる．校正方法は，現在分析業務で必要とされている装置依存性を示す強度/エネルギー応答関数の正確なエネルギー依存性を与えることができる．本校正方法はAESに関しては2%以下，XPSに関しては4%の再現性を示している．またAESに関しては，絶対的な意味でトレーサブル（追試可能）であり，応答関数はsr･eV単位で与えられ6%の精度を持っている．XPSでは集光X線単色分光系では応答関数はAESと同様にsr･eV単位で与えられるが，単色化されていないX線源系に対してはm2･sr･eV単位がより適切である．XPSに関してはX線の発生効率を除いて全ての項（term）に対して正確なトレーサビリティ（traceability：遡及性）がある．絶対的な断面積（cross-section）を求めるためには十分なトレーサビリティが必要であるが，何らかの正規化の手順を用いる場合にはトレーサビリティはそれほど重要ではない．

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ON DOCUMENTATION

Martin P. Seah

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THE PROGRESS OF QUANTITATIVE ANALYSIS BY ELECTRON SPECTROSCOPY

Martin P. Seah

The physical bases of most of the concepts for the quantitative analysis of solid surfaces by Auger and X-ray photoelectron spectroscopes was clearly established in the late 1960s and the 1970s. For Auger electron spectroscopy (AES) the basic theory involving the ionisation …

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CALIBRATION OF ELECTRON SPECTROMETER ENERGY SCALES FOR AES AND XPS

Martin P. Seah

The calibration of the energy scale of electron spectrometers for Auger electron spectroscopy (AES) and Xray photoelectron spectroscopy (XPS) is important for the routine identification of elements and chemical binding states.For most current work on chemical binding states in XPS a calibration …

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Comment on "Identification of background in CMA" [J. Surf. Anal. 14, 95 (2007)]

Martin P. Seah

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Work Functions and Electron Spectroscopy

Martin P. Seah

In a recent article [1] Sekine presents some interesting aspects of the problems of work functions in electron spectroscopy, and, in particular, for XPS. In his "Summary of the Issue" he defines work function and since that definition is essentially the same …

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AUGER ELECTRON SPECTROMETRY DATA BANK

Martin P. Seah

Following the detailed development of a traceable AES calibration system for electron spectrometer intensity [1,2,3] and energy [4] scales a data bank of AES spectra for the elements and a range of Journal of Surface Analysis Vol.1 No.1 (1995) pp.160 -161 -S48 …

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