Turbulent scalar transport in annular purging jet issuing from moving wafer stage of lithography machine
Jian Cao, Sen Li, Chuangxin He, Peng Wang et autres
1 citationInternational Journal of Heat and Fluid Flow
Jian Cao
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5Publications signalées
21Citations signalées
1Affiliations récentes
Institutions déclarées
Domaines associés
Heat Transfer MechanismsFluid Dynamics and Turbulent FlowsAerodynamics and Acoustics in Jet FlowsHeat Transfer and Boiling StudiesGear and Bearing Dynamics Analysis
Publications récentes
On simplified scenario of annular purging jet issuing from moving wafer stage in lithography machine
Jian Cao, Sen Li, Xin Wen, Hong Liu et autres
5 citationsScience China Physics Mechanics and Astronomy
Vortical structures and passive scalar transport in starting process of annular purging jet
Jian Cao, Peng Wang, Hong Liu, Benlong Wang et autres
4 citationsPhysics of Fluids
Influence of dual purging jets on interferometric measurement of optical path difference
Jian Cao, Peng Wang, Yingzheng Liu
11 citationsPhysics of Fluids
Axial Flow Seal/Bearing Efficient Pressure Formulation for a Reynolds Equation Solution
Paul E. Allaire, V N Yurko, Jian Cao, Tim Dimond
0 citationsApplied Mechanics and Materials
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