Accès ouvert
2026
article
OpenAlex
Bryan Sang Hoon Lee, Xue Rui, Ning Lü, Qiang Jin et autres
In advanced memory device architectures, the feature size at the targeted cut face during the focused ion beam (FIB) process has been reduced to sub-ten nanometer scale. Even with high-resolution scanning electron microscopy (SEM) resolution-level scanned cut-face image data, determining the stopping …
us
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2025
conference-paper
OpenAlex
Sang‐Hoon Lee, Xue Rui, Ning Lü, J. F. T. Pittman et autres
Abstract In advanced DRAM and NAND structures, the feature size at the targeted cut face during the Focused Ion Beam (FIB) process has been reduced to sub-ten nanometer scale. Even with high-quality SEM resolution level scanned cut-face image data, determining the stopping …
us, cz, lt
(code pays fourni par la source)
2024
conference-paper
OpenAlex
Sang‐Hoon Lee, Kenton Burns, Xue Rui, Shixin Wang et autres
Abstract This paper presents an automated focused ion beam (FIB) workflow that revolutionizes FIB-TEM sample preparation for semiconductor analysis, particularly for NAND and DRAM devices. This system integrates with Helios 5 HX and Helios 6 HX platforms to achieve consistent, hands-free sample …
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2023
conference-paper
OpenAlex
Yougui Liao, Marsela Pontoh, Tyler Lenzi
Abstract The goal of this project is to develop an automated algorithm of die filter to minimize the number of dies for PFA engineers to review and to confirm before PFA submission. This can reduce the workload of PFA engineers so that …
us
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2021
conference-paper
OpenAlex
Yougui Liao, Robert Wilkin, Tyler Lenzi, Scott A. Williams et autres
It is still challenging to have both statistical measurements of CD (critical dimension) in ease-of-use and flexibility of measuring various features in short turnaround, in combination with analytical TEM techniques. DigitalMicrograph (DM) is a very common software and is compatible with all …
us
(code pays fourni par la source)