Sho Amano

Development of a mesh nebulizer for high-yield generation of 1–5 μ m aerosols

Taki Watanabe, Sho Amano, Yuichi Utsumi, Kazuhiro Kanda

Liquid atomization is a key factor in inhalation therapy because it determines where inhaled aerosols deposit within the respiratory tract. Delivery to the deep lung generally requires aerosol generation in the range of 1–5 μm. However, current medical nebulizers often struggle to …

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Submicron-processing by X-ray lithography for medical mesh nebulizer

Taki Watanabe, Sho Amano, Yuichi Utsumi, Kazuhiro Kanda

Abstract X-ray lithography was performed using synchrotron radiation to fabricate a nozzle array filter with submicron-order aperture diameters for a mesh nebulizer, as generating mist with a high yield of submicron-sized droplets is essential for delivering medication deep into the lungs. Utilizing …

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Optical Properties of Uniaxially Anisotropic Gold Nanostructures Fabricated by Incline Magnetron Sputtering Process

Taku Tanaka, Syunya Saegusa, Masayuki Naya, Takao Fukuoka et autres

Surface-enhanced Raman scattering (SERS) is very useful for a spectroscopic technique that can enhance Raman scattering intensity up to 1014 times higher than conventional Raman signal due to the electric field enhancement effect. In this study, we fabricated and evaluated gold nanostructures …

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Micro Hot Stirrer Driven by Surface Acoustic Wave (SAW) for Agitation of High Viscosity Liquids

Masatoshi Takahashi, Tsunemasa Saiki, Shunya Saegusa, Yuichi Utsumi et autres

Recently, Micro Total Analysis System (µTAS) have been attracting attention. It is difficult to agitate high-viscosity liquids in microfluidic channels due to laminar flow. To facilitate stirring, we evaluated the characteristics of a micro hot stirrer using a SAW as a driving …

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X-ray multi-scale microfabrication system and x-ray imaging evaluation system all in one beamline

Kanta Yamamoto, Yuichi Utsumi, Ikuya Sakurai, Ikuo Okada et autres

We have completed a system that can achieve both deep x-ray lithography and submicron x-ray lithography with a single beamline by introducing the combination of x-ray plane and cylindrical mirrors. This x-ray lithography system can provide a large-scale microfabrication processing with 210 …

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Microprocessing Using X-Ray Lithography in NewSUBARU

Sho Amano

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Photodisintegration cross section of He4 in the giant dipole resonance energy region

Motoki Murata, T. Kawabata, Satoshi Adachi, H. Akimune et autres

We simultaneously measured the $^{4}\mathrm{He}(\ensuremath{\gamma}, n)^{3}\mathrm{He}$ and $^{4}\mathrm{He}(\ensuremath{\gamma}, p)^{3}\mathrm{H}$ reactions in the energy range around the giant dipole resonance. A quasi-monoenergetic photon beam produced via the laser Compton scattering technique was irradiated on the active-target time-projection chamber filled with helium gas, and …

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Vertical Chemical Unit Operation Using Microcapillary Arrays for Immunosorbent Assay

Mana Honkawa, Isao Kawaji, Sho Amano, Akimobu Yamaguchi et autres

In order to detect substances using microfluidic devices, fluidic filters with microcapillary arrays with a high aspect ratio were fabricated using deep X-ray lithography. Also, the pressure required to move the solution held on the filter to the lower reservoir was 1～10 …

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Aggregation of Au Colloids using Surface Acoustic Waves

Shunya Saegusa, Tsunemasa Saiki, Sho Amano, Takao Fukuoka et autres

For the implementation of SERS in microfluidic devices, we propose a rotor structure using SAW as a simple aggregation mechanism. In this study, 45 nm gold nanoparticles were agglomerated in a rotor and evaluated. It was found that the aggregate size increased …

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Speculation of Mechanical Properties of Ni-W Micro-gears Fabricated by LIGA Process

Kanta Yamamoto, Kohzo Tamada, Kana Okamoto, Sho Amano et autres

Microgears made of Ni-W alloy that are expected to have high durability, were successfully fabricated by using the LIGA process with synchrotron radiation. In this study, Ni-W electrodeposited alloy microgears were mechanically evaluated. The LIGA process based on the synchrotron radiation facility, …

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Study of Dihedral-Corner-Reflector-Array Fabrication Process Using Soft X-ray Deep X-ray Lithography

Taki Watanabe, Sho Amano, Shinya Izawa, Satoshi Maekawa et autres

We fabricated sectoral-pillar structures for Dihedral Corner Reflector Array (DCRA) using Deep X-ray Lithography (DXRL) in New SUBARU Synchrotron Radiation Facility. We studied process conditions such as a start timing of development after exposure and development temperature. We succeeded in fabricating a …

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Development of High Accurate Multi-Step Deep X-ray Exposure System Using Two-axial PZT Actuators

Taki Watanabe, Sho Amano, Kaito Fujitani, Akinobu Yamaguchi et autres

Deep X-ray Lithography (DXRL) has conventionally processed shapes that depend on the two-dimensional pattern of the X-ray mask used. In this study, we attempted to fabricate microstructures of micron-order 3D arbitrary shapes on a PMMA surface by using a high-precision multi-step exposure …

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