The radiofrequency magnetic dipole discharge
E. Martines, M. Zuin, M. Marcante, R. Cavazzana et autres
This paper describes a novel and simple concept of plasma source, which is able to produce a radiofrequency magnetized discharge with minimal power requirements. The source is based on the magnetron concept and uses a permanent magnet as an active electrode. The …
it (code pays fourni par la source)