High speed deodorization technology using plasma induced flow
Shotaro OKA, Akio Ui, Masato AKITA, Yosuke Sato
0 citationsRyuutai Kougaku Bumon Kouenkai kouen rombunshuu/Ryutai Kogaku Bumon Koenkai koen ronbunshu
Akio Ui
Informations fournies par OpenAlex. Research Africa ne déduit ni nationalité, ni poste, ni coordonnées personnelles.
10Publications signalées
71Citations signalées
1Affiliations récentes
Institutions déclarées
Domaines associés
Plasma Diagnostics and ApplicationsMetal and Thin Film MechanicsPlasma Applications and DiagnosticsCopper Interconnects and ReliabilityAerosol Filtration and Electrostatic Precipitation
Publications récentes
Numerical analysis of plasma formation process in a coaxial dielectric barrier discharge
Yosuke Sato, Akio Ui, Shotaro OKA, Kenji Ishikawa et autres
0 citationsThe Proceedings of Mechanical Engineering Congress Japan
Numerical simulations of stable, high-electron-density atmospheric pressure argon plasma under pin-to-plane electrode geometry: effects of applied voltage polarity
Yosuke Sato, Kenji Ishikawa, Takayoshi Tsutsumi, Akio Ui et autres
33 citationsJournal of Physics D Applied Physics
Numerical Analysis on Size Dependency of Particulate Matter Behavior in Electric Collector
0 citationsBulletin of the American Physical Society
Generation of obliquely incident ions using phase-shifted RF voltages applied on rod electrodes
Akio Ui, Yosuke Sato, Toshiyuki Sasaki, Itsuko Sakai et autres
2 citationsJapanese Journal of Applied Physics
Ion energy control in reactive ion etching using 1-MHz pulsed-DC square-wave-superimposed 100-MHz RF capacitively coupled plasma
Akio Ui, Hisataka Hayashi, Itsuko Sakai, Takeshi Kaminatsui et autres
8 citationsJournal of Vacuum Science & Technology A Vacuum Surfaces and Films
A study of generation of obliquely incident ions
Akio Ui, Y Sato, Tomoya Sasaki, Ikuo Sakai et autres
0 citations
Sub-45 nm SiO2 Etching with Stacked-Mask Process Using High-Bias-Frequency Dual-Frequency-Superimposed RF Capacitively Coupled Plasma
Keisuke Kikutani, Takashi Ohashi, Akihiro Kojima, Itsuko Sakai et autres
17 citationsJapanese Journal of Applied Physics
Multi-objective Optimization for Plasma CVD Process
Yasuyuki Yokono, Akio Ui, Takashi ICHIKAWA, T. Kuroiwa et autres
0 citationsKeisan Rikigaku Koenkai koen ronbunshu/Keisan Rikigaku Kouenkai kouen rombunshuu
Surface-enhanced resonance Raman scattering study on the axial ligation states of manganese and chromium tetraphenylporphines adsorbed on silver electrode surfaces
Tatsushi Okumura, Akio Ui, Koichi Itoh
11 citationsInorganic Chemistry
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