Steffen Kalisch

A mathematical model for the external scheduling of a cluster tool workstation

Gottfried Nieke, Christian Maleck, Karlheinz Bock, Marcel Stehli et autres

Cluster tools are closed mini production environments that are especially used in the semiconductor industry. They consist of multiple processing chambers. In contrast to single processing tools they can handle multiple lots with different process characteristics at the same time. The major …

de (code pays fourni par la source)

A MATHEMATICAL MODEL FOR THE EXTERNAL SCHEDULING OF A CLUSTER TOOL WORKSTATION

Gottfried Nieke, Christian Maleck, Karlheinz Bock, Marcel Stehli et autres

Cluster tools are closed mini production environments that are especially used in the semiconductor industry. They consist of multiple processing chambers. In contrast to single processing tools they can handle multiple lots with different process characteristics at the same time. The major …

de (code pays fourni par la source)

Managing WIP and cycle time with the help of loop control

Steffen Kalisch, Robert L. Ringel, Jörg Weigang

As an adaptation of the CONWIP concept, AMD has de-veloped a heuristic approach to control the WIP in its wa-fer fabrication facilities (fabs). The so called “Loop Con-trol ” concept helps to utilize the installed equipment in an efficient way and reduces …

Managing WIP and cycle time with the help of Loop Control

Steffen Kalisch, Robert L. Ringel, Jörg Weigang

As an adaptation of the CONWIP concept, AMD has developed a heuristic approach to control the WIP in its wafer fabrication facilities (fabs). The so called “loop control” concept helps to utilize the installed equipment in an efficient way and reduces the …