Investigation on reticle heating effect induced overlay error
Mijung Lim, Geunhak Kim, Seo-Min Kim, Byounghoon Lee et autres
As design rule of semiconductor decreases continuously, overlay error control gets more and more important and challenging. It is also true that On Product Overlay (OPO) of leading edge memory device shows unprecedented level of accuracy, owing to the development of precision …
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8 citations
Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE