Mode-Localized uniaxial MEMS accelerometer with tunable sensitivity

Résumé fourni par la source

Abstract This paper presents a microelectromechanical system (MEMS) accelerometer based on mode localization in electrostatically coupled resonators. The device exploits energy redistribution between weakly coupled modes to convert external acceleration into measurable amplitude localization, providing a detection mechanism with high sensitivity. Lever amplification and electrostatic tuning are introduced to enhance the inertial-to-stiffness transduction and enable controllable sensor response. Experimental results demonstrate a linear relative amplitude change ratio sensitivity of approximately 5.1/g under specific excitation conditions. The sensitivity can be further improved by reducing coupling stiffness or introducing controlled asymmetry. These results demonstrate a scalable and tunable modal-localization-based sensing strategy, offering a promising route for high-performance MEMS inertial sensors.

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