Miniaturized PtSe₂-Based Piezoresistive Pressure Sensors With Enhanced Sensitivity

Le résumé fourni par la source

Device miniaturization has emerged as a key driver in the advancement of micro- and nano-electromechanical systems (MEMS/NEMS), enabling enhanced performance, reduced power consumption, and the integration of multiple functionalities into compact platforms. Platinum diselenide (PtSe2), a noble metal dichalcogenide (NMDC), has unique characteristics that are particularly advantageous for piezoresistive sensing. Membrane-based PtSe2piezoresistive pressure sensors have demonstrated excellent sensitivity in previous studies, although typically using large arrays of membranes designed to counteract low device yield. In this work, we push the boundaries of device miniaturization and demonstrate PtSe2pressure sensors with single cavities and circular channels. Our sensors exhibit sensitivities of up to 1 × 10-3kPa-1for a 42 μm cavity device and achieve high area-normalized sensitivity values of more than 2 × 10-6kPa-1μm-2for 20 μm cavity devices without compromising sensor performance. These results highlight the potential of PtSe2for highly sensitive, miniaturized pressure sensing applications.

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