Fabrication of High-Quality Large-Scale Ultrathin and Narrow YBa2Cu3O7-δ Superconducting Meander Wire Array

Le résumé fourni par la source

Large-scale quantum devices based on high-temperature superconductors and other sensitive materials are promising for next‑generation quantum sensing and imaging, yet their practical realization is hindered by device non-uniformity, scalability, and degradation of materials properties during fabrication. Here we present a universal strategy for large‑area high‑temperature superconducting array with excellent uniformly. Using ultrathin YBCO films and a high‑precision SiNx stencil mask for fine electrodes definition, we preserve the intrinsic performance and large-area uniformity of YBCO prior to microwire patterning. Together with the low-damage film patterning process, we fabricate a 64 × 64 meandered microwire array with with a linewidth of 1 μm, edge roughness below 16 nm and an effective sidewall‑damage width of ~50 nm. Comprehensive characterization of 121 devices reveals high uniformity, with a critical temperature of 75 K and 86.8% of units exhibiting a critical current within a narrow 2 {plus minus} 0.1 mA range. This scalable, low-damage approach not only overcomes the processing bottlenecks of YBCO but also provides a versatile platform applicable to a broad spectrum of fragile quantum materials, paving the way for next-generation superconducting electronics and imaging systems.

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