DEVELOPMENT OF THREE-DIMENSIONAL ANALYSIS METHOD FOR SMALL SAMPLES BY FIB-TOF-SIMS
Rattachement africain : jp. Niveau de preuve : code pays fourni par la source.
Le résumé fourni par la source
In order to design and develop high-performance devices and batteries, it is necessary to analyze the internal structure and element distribution of materials at the nanoscale.The FIB-TOF-SIMS developed in our laboratory has the world's highest spatial resolution of 40 nm and is capable of simultaneous analysis of all elements.Furthermore, since it is equipped with two FIB columns, three-dimensional analysis of micro samples by slice and view has been realized.In this study, we performed slice and view of a fly ash particle, and then performed three-dimensional reconstruction with ImageJ Fiji to confirm the applicability of this device to threedimensional analysis.As a result, it was found that the obtained threedimensional image maintained the z-axis coordinate and particle shape.
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