Suspended waveguide-enhanced near-infrared photothermal spectroscopy for ppb-level molecular gas sensing on a chalcogenide chip
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Le résumé fourni par la source
Abstract On-chip waveguide sensors have attracted significant attention recently due to their potential for high-level integration. However, so far, on-chip gas sensing based on traditional laser absorption spectroscopy has demonstrated low detection sensitivity, due to weak light-gas interaction over a limited interaction distance. On-chip photothermal spectroscopy (PTS) appears to be a powerful technique to achieve higher sensitivity; its performance is yet constrained to parts-per-million (ppm)-level due to a small fraction of evanescent field in the light-gas interaction zone and fast thermal dissipation through the solid substrate. Herein, we demonstrated suspended chalcogenide glass waveguide (ChGW)-enhanced PTS that overcomes these limitations, enabling highly sensitive parts-per-billion (ppb)-level molecular gas sensing. We fabricated a nanoscale suspended ChGW with a low loss of 2.6 dB/cm using a CMOS-compatible two-step patterning process. By establishing an equivalent PTS model to guide the optimization of the ChGW geometry, we achieved a 4-fold increase in the absorption-induced heat source power and a 10.6-fold decrease in the equivalent heat conductivity, resulting in a 45-fold enhancement in photothermal phase modulation efficiency over the non-suspended waveguides. Combining with a high-contrast waveguide facet-formed Fabry-Perot interferometer, we achieved an unprecedented acetylene detection limit of 330 ppb, a large dynamic range close to 6 orders of magnitude, and a fast response of less than 1 s. The overall system exhibits a noise-equivalent absorption coefficient of 3.8×10 −7 cm −1 , setting a new benchmark for photonic waveguide gas sensors to the best of our knowledge. This work provides a key advancement towards prototyping an integrated sensor-on-a-chip for highly sensitive and background-free photonic sensing applications.
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Le contrôle bibliographique ouvert
DOI retrouvé dans Crossref DOI retrouvé ; titre concordant.
- Titre Crossref
- Suspended waveguide-enhanced near-infrared photothermal spectroscopy for ppb-level molecular gas sensing on a chalcogenide chip
- Date Crossref
- 17/02/2026
- Éditeur
- Springer Science and Business Media LLC
- Type
- journal-article
Ce recoupement confirme des métadonnées liées au DOI. Il ne confirme ni la méthode ni les conclusions de l’étude, et il ne compte pas comme une seconde source scientifique indépendante.
Où se fait cette recherche
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Hong Kong Polytechnic University Department of Electrical and Electronic Engineering and Photonics Research Institute pays non établi dans la noticeUniversité ou école supérieure
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Shenzhen Polytechnic University pays non établi dans la noticeUniversité ou école supérieure
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Zhejiang Lab pays non établi dans la noticeStructure de recherche
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State Key Laboratory on Integrated Optoelectronics pays non établi dans la noticeStructure de recherche
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Chinese Academy of Sciences pays non établi dans la noticeOrganisme public
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Changchun Institute of Optics pays non établi dans la noticeStructure de recherche
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College of Electronic Science and Engineering State Key Laboratory of Integrated Optoelectronics pays non établi dans la noticeUniversité ou école supérieure
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State Key Laboratory of Luminescence and Applications pays non établi dans la noticeStructure de recherche
Department of Electrical and Electronic Engineering and Photonics Research Institute — Hong Kong Polytechnic University, Shenzhen Polytechnic University et Zhejiang Lab, avec 5 autres affiliations.
Une affiliation ne permet pas de déduire la nationalité d’un auteur.