PID-Like Controllers for a Class of Uncertain Underactuated Nonlinear Systems with Application to Wafer-handling Robot

Résumé fourni par la source

We develop an output feedback tracking controller for a class of underactuated nonlinear systems, specifically applied to a wafer handling robot in semiconductor manufacturing. The proposed controller exhibits performance similar to a PID controller, incorporating proportional, derivative, and integral components to shape both transient and steady-state behavior. Unlike traditional approaches, the controller does not require any stability assumptions on the system’s zero dynamics, making it well-suited for non-minimum phase systems. The design process begins with a full-state feedback controller to achieve the tracking objective. This is then extended into an output feedback control framework by integrating an Extended High-Gain Observer (EHGO). The EHGO employs a cascade observer structure, estimating the unmeasured output from available system measurements to ensure accurate feedback. As a case study, we demonstrate that for a relative degree-two system, the state feedback controller simplifies into a PID-like structure, enhancing ease of implementation. The proposed control strategy is validated by applying it to a wafer-handling robot described as a flexible joint system. The results showcase the robot’s ability to achieve precise trajectory tracking while compensating for uncertainties and external disturbances. They also highlight the controller’s robustness and adaptability, making it a viable solution for high-precision wafer transfer operations in semiconductor fabrication.

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