Development of a piezoresistive accelerometer with both high natural frequency and superior overload capability

Résumé fourni par la source

Accelerometers featuring high natural frequencies and superior overload capabilities are particularly valuable in applications such as military low-threshold-weapon fuzes. However, synergistic improvement of these parameters is bottlenecked by the trade-off between sensitivity and natural frequency, and the trade-off between natural frequency and displacement limit. Here, via designing anti-overload structures integrated with the pure-axial-stressed sensing structure, we achieve simultaneous high natural frequency and superior overload capability. The proposed sensor is fabricated and characterized. Results yield a sensitivity of 0.037±0.002 mV/g at 2 V and a natural frequency of 31.35±0.72 kHz, comparable to the reference sensor, and an overload capability of 19445.80±290.55 g representing a 133.84% improvement. Accelerometers with high natural frequency and superior overload capability enable high-fidelity measurement of broadband signals under harsh environments. • Piezoresistive accelerometers achieving 19445.80-g overload capability are developed. • A natural frequency of 31.35 kHz and a sensitivity of 0.037 mV/g @ 2V are achieved. • Design model of sensing structures with mechanical stopper is developed and verified. • Critical fracture stresses are 1.67 GPa (proposed sensor) and 1.26 GPa (ref. sensor). • Enhancement mechanism is analyzed based on experimental and simulation results.

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