Classical to Quantum Diffusive Transport in Atomically Thin Semiconductors Capped with High-k Dielectric

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The dielectric environment surrounding semiconductors plays a crucial role in determining device performance, a role that becomes especially pronounced in atomically thin semiconductors where charge carriers are confined within a few atomic layers and strongly interact with their surroundings. High-k dielectrics, such as hafnium oxide (HfO2), have been shown to enhance the performance of two-dimensional (2D) materials by suppressing scattering from charged impurities and phonons, but most studies to date have focused on room-temperature transistor operation. Their influence on quantum transport properties at low temperatures remains largely unexplored. In this work, we investigate how capping monolayer molybdenum disulfide (MoS2) with HfO2 modifies its electronic behavior in the quantum regime. By comparing devices with and without HfO2 capping, we find that uncapped devices exhibit transport dominated by classical diffusive scattering, whereas capped devices show clear Fabry-Perot interference patterns, providing direct evidence of phase-coherent quantum transport enabled by dielectric screening. To gain further insight, we develop a tight-binding interferometer model that captures the effect of dielectric screening on conductive modes and reproduces the experimental trends. Our findings demonstrate that dielectric engineering provides a powerful route to control transport regimes in TMD devices.

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