Building environment control for advanced precision instruments - state-of-the-art and future perspectives

Le résumé fourni par la source

With the development of modern science, sensitive precision instrumentations, which require a reliable and ultra-high precision building environment of temperature, humidity, vibration, cleanliness, and much more, have been increasingly concerned in high-tech scenarios such as advanced metrology, scientific instrumentations, and high-tech fabrications. Nowadays, there is a lack of systematic reviews on advanced building environment control technologies for precision instruments, which have huge differences from widely-used comfort air-conditioning systems. Firstly, requirements and problems for the design in different application scenarios are discussed. Then, challenges and limitations for operation control are demonstrated. According to existing studies, the convective-radiant combined supply cooling mode may be a potential technology, and yet there are still unsolved problems including micro-vibration, multi-parameter cooperative precision control, fluctuation suppression, and dehumidification of ultra-low humidity environment. This review is expected to provide the reference for researchers, designers, and builders to design and implement building environment solutions for advanced precision instruments.

Ce résumé expose les affirmations des auteurs. BNTIC ne l’interprète pas comme une validation indépendante des résultats.