The effect of Ar and CO2 gas mixture composition during sputtering of (Ba,Sr,Ca)CO3 films on surface roughness and emission properties
Le résumé fourni par la source
The paper studies the influence of the composition of the Ar+CO2 gas mixture on the change in the chemical composition and morphology of emission coatings deposited using the ion-plasma method at a substrate holder temperature of 150-208 ºС. The grain size and surface roughness of the film are studied using scanning probe microscopy. The chemical composition of the deposited (Ba,Sr,Ca)CO3 films is studied using energy-dispersive X-ray analysis (EDXA). As the concentration of carbon dioxide in the gas mixture increases, the film grains enlarge to 1980 nm and lengthen, revealing an internal core nanostructure with an average transverse size of nanograins up to 181 nm. The influence of the gas composition on the deposition process and emission properties of molecularly sputter-deposited oxide microcathodes is shown.
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Le contrôle bibliographique ouvert
DOI retrouvé dans Crossref DOI retrouvé ; titre concordant.
- Titre Crossref
- The effect of Ar and CO2 gas mixture composition during sputtering of (Ba,Sr,Ca)CO3 films on surface roughness and emission properties
- Date Crossref
- 01/06/2025
- Éditeur
- Kotelnikov Institute of Radioengineering and Electronics of Russian Academy of Sciences
- Type
- journal-article
Ce recoupement confirme des métadonnées liées au DOI. Il ne confirme ni la méthode ni les conclusions de l’étude, et il ne compte pas comme une seconde source scientifique indépendante.