MEMS Chip-Based Miniaturized Fiber-Optic Fabry–Pérot Sensor for Highly-Sensitive and Wide-Band Acceleration Detection
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Le résumé fourni par la source
Fiber-optic Fabry-Perot (FP) sensor has the advantages of small structural size, high sensitivity, and immunity to electromagnetic interference, which has been widely used in acceleration detection. However, due to the fact that the acceleration sensing structure is mainly based on the mass inertia model, this leads to a mutual constraint between the natural frequency and sensitivity of the sensor. Therefore, it is difficult for fiber-optic FP accelerometers to achieve both wide operating frequency band and high sensitivity simultaneously. In this work, we propose and demonstrate a wide-band and highly-sensitive optical accelerometer based on dual cascaded spring resonators, which is microfabricated by Micro Electro Mechanical Systems (MEMS) technique. Its unique in-plane vibration mode is used to expand the operating frequency band of the sensor, and two different structures of cascaded spring resonator accelerometers are combined to compensate for frequency loss caused by resonance peaks. The entire MEMS chip exhibits a uniform thickness of 300μm, greatly simplifying silicon microfabrication and improving process yield. The experimental results show that the flat response range of the sensor is 1$\sim$1780 Hz, and the detection sensitivity is 11.55 dB re rad/g, which is nearly 16 dB higher than the sensitivity of traditional same frequency band accelerometers. The minimum detectable acceleration of the sensor is 2.23$\mu \rm {g}/$√Hz@10Hz, 409$\rm {ng}/$√Hz@100Hz and 359$\rm {ng}/$√Hz@1kHz. The overall crosstalk is less than 1.33 %. These excellent performances demonstrate that it is an ideal solution for detecting wideband and weak vibration signals.
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Le contrôle bibliographique ouvert
DOI retrouvé dans Crossref DOI retrouvé ; titre concordant.
- Titre Crossref
- MEMS Chip-Based Miniaturized Fiber-Optic Fabry–Pérot Sensor for Highly-Sensitive and Wide-Band Acceleration Detection
- Date Crossref
- 15/06/2025
- Éditeur
- Institute of Electrical and Electronics Engineers (IEEE)
- Type
- journal-article
Ce recoupement confirme des métadonnées liées au DOI. Il ne confirme ni la méthode ni les conclusions de l’étude, et il ne compte pas comme une seconde source scientifique indépendante.
Où se fait cette recherche
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Wuhan National Laboratory for Optoelectronics pays non établi dans la noticeStructure de recherche
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Huazhong University of Science and Technology pays non établi dans la noticeUniversité ou école supérieure
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Hangzhou Institute of Applied Acoustics pays non établi dans la noticeStructure de recherche
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Academy of Military Medical Sciences pays non établi dans la noticeStructure de recherche
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School of Optical and Electronic Information Wuhan National Laboratory for Optoelectronics (WNLO) and National Engineering Research Center of Next Generation Internet Access System pays non établi dans la noticeUniversité ou école supérieure
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Hangzhou Applied Acoustics Research Institute pays non établi dans la noticeStructure de recherche
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East Microelectronics Technology Company pays non établi dans la noticeEntreprise
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National Innovation Institute of Defense Technology pays non établi dans la noticeStructure de recherche
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School of Electronic Information and Communications pays non établi dans la noticeUniversité ou école supérieure
Wuhan National Laboratory for Optoelectronics, Huazhong University of Science and Technology et Hangzhou Institute of Applied Acoustics, avec 6 autres affiliations.
Une affiliation ne permet pas de déduire la nationalité d’un auteur.