Modeling and Verification of Arc Temperature and Melt Formation for High-Precision Fabrication of Micro-Tungsten Styli

Le résumé fourni par la source

Microspherical tungsten styli are widely used for precision measurements of microdevices with high aspect ratio. Traditional fabrication methods face challenges such as difficulty in precisely controlling diameter, as well as instability in roundness and center offset. To address these issues, this article presents a new 2-D numerical model that integrates the magnetohydrodynamic (MHD) equation, droplet force, and dynamic mesh technology to simulate the arc discharge and melt formation process. This model aims to improve the accuracy and consistency of tungsten stylus fabrication. The study investigates the multiphysical phenomena involved in the process, including the arc’s temperature, conductivity, flow rate, and magnetic intensity, as well as the formation of micro-tungsten spheres. It was found that the arc temperature can be precisely controlled by adjusting discharge parameters, enabling accurate control of the stylus diameter. A novel observation in this study is that the tungsten wire end is first sharpened to half of its original diameter, then melted from both sides and formed into a ball. The experimental results show that when the arc cathode temperature is approximately 12000 K, the prepared tungsten stylus exhibits higher quality, with an average diameter of$82.9~\mu $m, roundness of$0.57~\mu $m, and center offset of$0.66~\mu $m. It demonstrates superior surface quality and shape consistency compared to traditional methods. This study provides a new idea for optimizing arc discharge parameters, especially arc temperature control, which helps to achieve batch manufacturing of high-precision micro-tungsten stylus.

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