A Novel Liquid-Enhanced Micro Thermal Expansion-Based Angular Motion Sensor With Ultrahigh Sensitivity
Rattachement africain : cn, mo, hk. Niveau de preuve : code pays fourni par la source.
Le résumé fourni par la source
This article presents the development of highly sensitive micro thermal expansion-based angular motion (TEAM) sensors utilizing water and ethanol as the working fluids. Theoretical analysis demonstrates that replacing the gas medium with liquids significantly increases the sensitivity of TEAM sensors, attributed to the larger Rayleigh number (Ra*). Among the two liquids studied, the ethanol-based TEAM sensor exhibits greater sensitivity to fluctuations in thermal properties than the water-based sensor. To ensure waterproofing, a Parylene-C coating was applied as the encapsulation layer for developing the novel liquid-based sensors. Experimental results identify a critical Ra* of 2950, which distinguishes the linear and nonlinear regions of operation for both the water-based and ethanol-based sensors. In the linear region, the water-based and ethanol-based sensors exhibit normalized sensitivities of 0.1638 and 0.37 mV/°/s/mW, respectively, which are more than 10 times and 20 times higher than those of conventional air-based sensors, supporting the theoretical predictions and confirming the feasibility of the proposed design strategy. Furthermore, the ethanol-based TEAM sensor outperforms the sulfur hexafluoride (SF6)-based sensor, currently the most sensitive gas-based thermal angular motion (TAM) sensor, by over five times. The experimental comparisons of single-heater and dual-heater configurations further highlight the importance of the dual-heater setup in minimizing heat loss and enhancing sensor performance, particularly for liquid-based sensors. These findings demonstrate the potential of the liquid-enhanced TEAM sensor for developing more accurate and reliable angular motion detection systems in complex environments.
Ce résumé expose les affirmations des auteurs. BNTIC ne l’interprète pas comme une validation indépendante des résultats.
Le contrôle bibliographique ouvert
DOI retrouvé dans Crossref DOI retrouvé ; titre concordant.
- Titre Crossref
- A Novel Liquid-Enhanced Micro Thermal Expansion-Based Angular Motion Sensor With Ultrahigh Sensitivity
- Date Crossref
- 15/04/2025
- Éditeur
- Institute of Electrical and Electronics Engineers (IEEE)
- Type
- journal-article
Ce recoupement confirme des métadonnées liées au DOI. Il ne confirme ni la méthode ni les conclusions de l’étude, et il ne compte pas comme une seconde source scientifique indépendante.
Où se fait cette recherche
-
Sun Yat-sen University pays non établi dans la noticeUniversité ou école supérieure
-
University of Macau Institute of Microelectronics pays non établi dans la noticeUniversité ou école supérieure
-
Institute of Microelectronics pays non établi dans la noticeStructure de recherche
-
Beijing Institute of Technology pays non établi dans la noticeUniversité ou école supérieure
-
Hong Kong University of Science and Technology Department of Mechanical and Aerospace Engineering pays non établi dans la noticeUniversité ou école supérieure
-
University of Hong Kong pays non établi dans la noticeUniversité ou école supérieure
-
School of Microelectronics Science and Technology pays non établi dans la noticeUniversité ou école supérieure
-
School of Integrated Circuits and Electronics pays non établi dans la noticeUniversité ou école supérieure
Sun Yat-sen University, Institute of Microelectronics — University of Macau et Institute of Microelectronics, avec 5 autres affiliations.
Une affiliation ne permet pas de déduire la nationalité d’un auteur.