Radio-frequency capacitively coupled plasma parameters evolution as a function of magnetic field strength

Le résumé fourni par la source

The use of magnetic fields in low-temperature plasma physics is promising in numerous applications. The magnetic field acts on the kinetic of the plasma charged particles, drastically modifying the ion and electron trajectories in the plasma. The influence of the magnetic field strength on plasma parameters, like the plasma and the electrode potentials, was measured for different gases and pressures, evidencing a strong variation before saturating for high magnetic fields. The saturation is connected to the variation of the ions and electrons collection area. It occurred when the magnetic field influence overcame the collisional effect, i.e. when the Larmor radius of ions became smaller than the ion mean free path. The electrostatic probe’s floating potential saturation was a marker of ion magnetisation. Varying the pressure enabled collision cross-section calculation for magnetised discharges. The estimated values in this contribution were consistent with the literature. Finally, the probe developed in this contribution allows for the quasi-independent measurement of perpendicular and parallel flux.

Ce résumé expose les affirmations des auteurs. BNTIC ne l’interprète pas comme une validation indépendante des résultats.