Development of Photon-to-Digital Converters -- A 3D Integrated Digital Single- Photon Detector

Le résumé fourni par la source

We develop 3D integrated photon-to-digital converters (PDC) aimed to replace PMTs and SiPMs in various radiation science applications. In previous years we reported on a CMOS readout electronics designed for low power consumption in large area systems such as noble liquid dark matter or neutrino searches, or fast neutron spectroscopy. System integration of these PDCs has also been demonstrated. We also reported on the development of the SPAD technology optimized for precise timing at wavelengths below 500~nm and specifically designed to be 3D integrated onto the CMOS readout. A comprehensive test platform allows performing all SPAD testing in Geiger mode on either dies or wafers was also demonstrated. A revised CMOS readout modified to ease large system integration was designed. Wafers of this readout were produced and we are presently characterizing them to study performance variations on and across wafers. We also discuss the challenges of resizing and matching patterns between TSMC wafers and our custom SPAD layer. Recently, we have completed key milestones with wafer-to-wafer bonding of mock-up SPAD wafers onto resized but otherwise unprocessed TSMC CMOS wafers. We are proceeding with the bonding of functional SPAD wafers onto CMOS readout wafers to complete the first lot of 3D PDCs. We will report on their fabrication, on the CMOS readout operation, and on the SPAD performance.

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