Gas Sensor Arrays by Supersonic Cluster Beam Deposition

Le résumé fourni par la source

Supersonic cluster beam deposition was employed to produce nanostructured thin films of transition metal oxides to be used as gas sensors. Due to high nanoparticle beam collimation, patterned deposition was easily obtained by using hard masks, achieving sub-micrometric resolution. To exploit hard mask patterning micro-machined substrates having an array structure were developed in order to deposit materials with different properties on each single element of the array. Results on the deposition of nanostructured TiO 2 , WO 3 , SnO 2 and on the detection of volatile organic compounds (VOC) and gases related to environmental pollution (such as NO x ) are reported.

Ce résumé expose les affirmations des auteurs. BNTIC ne l’interprète pas comme une validation indépendante des résultats.