Design and Manufacture of SAW Resonators for Low Phase Noise and Low Vibration Sensitivity Applications

Le résumé fourni par la source

This paper describes the latest techniques in the design and manufacture of high performance SAW grooved resonators on quartz. Close agreement between theoretical and experimental design is obtained. A greater than 80% yield on the processing of SAW resonators is achieved. A novel probe for the automatic testing of SAW resonators is developed to optimize production efficiency and manufacturing cost. The mounting of SAW resonators in a ceramic package is described and the phase noise and vibration sensitivity in an oscillator configuration are studied. The results on the fabrication of 315.5 MHz, 500 MHz and 996 MHz SAW resonators are given. Some of the characteristics such as phase noise for an oscillator of 100 dBc/Hz at 200 Hz from the carrier, vibration sensitivity of less than 3x10 -9 (Af/f per g), and aging properties are reported. The design philosophy used in the fabrication of the SAW grooved resonators is the same as that of R.C.M. Li in his study of these devices. The following sources of loss were included:

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