Maximum entropy analysis of the effects of elastic scattering on the reconstruction of depth profiles from angle‐dependent XPS measurements

Résumé fourni par la source

Abstract The maximum entropy technique is a powerful general‐purpose data analysis tool that has been applied to the reconstruction of composition depth profiles from angle‐resolved x‐ray photoelectron spectroscopy measurements. In this paper, the work is extended to include the effects of electron elastic scattering using a recently developed description of electron transport in solid materials. The new description of photoelectron transport has been encoded into the forward calculation of the data, and maximum entropy used to determine depth profiles from angle‐resolved XPS within this improved approximation. The effects of elastic scattering on the reconstructions are seen primarily as a reduction in the depth probed by the technique.

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