Surface processes of highly charged ions

Le résumé fourni par la source

Striking features of radiation effects by a highly charged ion (HCI) impact onto a surface are shown. The HCI-impact effects depend strongly on the electronic property of the target material and are restricted within the nanometer-sized area on the surface. Further, a challenging experiment for application of HCI-based nano-processing is presented. One of the examples for the processing can be seen in the interaction of a HCI with a hydrogen-terminated Si surface. We try to produce a SiO nano-structure on the Si surface with a chemical reaction of oxygen molecules to the active region induced by individual HCI impacts.

Ce résumé expose les affirmations des auteurs. BNTIC ne l’interprète pas comme une validation indépendante des résultats.