Simulation assessment of 9.6 μm CO 2 laser drive for Sn-LPP EUV generation
Ziyi Wu, Jiajun Wang, Tian Yu, Mengqi Zhang et autres
Conventional Sn laser-produced plasma extreme-ultraviolet sources are mainly driven by 10.6 μm CO 2 lasers. In short-pulse CO 2 laser amplification systems, the 9P band at 9.6 μm can serve as an additional gain channel for increasing the extracted laser energy. However, …
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