Influences of Voltage Cycling on Variations in HfO 2 -based 3D Trench FeRAM
Weiwen Pan, Fei Yu, Peiyuan Du, Wanmei Zhang et autres
In this work, we experimentally investigated the variation behavior of HfO2-based 3D trench ferroelectric random access memory (FeRAM) under different voltage cycling conditions. The remanent polarization (Pr) and coercive field (Ec) were extracted to evaluate device-to-device (D2D) and cycle-to-cycle (C2C) variations. The …
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