Stacked DRAM Solution: Multilayer Horizontal Cell (MHC) 1T1C DRAM
Kai Shao, Lin Yuan, Zengchao Song, Nan Wu et autres
Stacked dynamic random access memory (DRAM) technology has garnered considerable attention as a means to continue the relentless pursuit of scaling. In this context, we have developed a five-layer horizontal cell with vertical word line (WL) and pillar capacitor to realize a …